In situ and real-time ellipsometry monitoring of submicron titanium nitride/titanium silicide electronic devices

Applied Surface Science

Volumn 154, Issue , 2000, Pages 256-262

  Patsalas, P ^a   Charitidis, C ^a   Logothetidis, S ^a  

^a ARISTOTLE UNIVERSITY OF THESSALONIKI   (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ANNEALING; DIELECTRIC PROPERTIES OF SOLIDS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MICROSTRUCTURE; OPTICAL PROPERTIES; PHASE TRANSITIONS; SILICON; TITANIUM; TITANIUM NITRIDE;

KINETIC ELLIPSOMETRY (KE); SPECTROSCOPIC ELLIPSOMETRY (SE); TITANIUM SILICIDE;

MULTILAYERS;

EID: 0033897545     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(99)00444-4     Document Type: Article

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