Microelectromechanical system based variable optical attenuator by vertically bending waveguides

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 24, Issue 3, 2006, Pages 802-806

  Zhang, Guhong ^a   Jessop, Paul E ^a  

^a MCMASTER UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

DEFORMATION; ELECTROSTATICS; MICROELECTROMECHANICAL DEVICES; OPTICAL WAVEGUIDES; SILICON ON INSULATOR TECHNOLOGY;

ELECTROSTATIC BENDING; ELECTROSTATIC ZIPPING ACTUATION; INSULATOR WAVEGUIDE; VARIABLE OPTICAL ATTENUATOR;

ATTENUATION;

EID: 33646564399     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2190651     Document Type: Article

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