Si wafer bonded of a-Si/a-SiN x distributed Bragg reflectors for 1.55-μm -wavelength vertical cavity surface emitting lasers

Journal of Applied Physics

Volumn 98, Issue 4, 2005, Pages

  Levallois, C ^a   Le Corre, A ^a   Loualiche, S ^a   Dehaese, O ^a   Folliot, H ^a   Paranthoen, C ^a   Thoumyre, F ^a   Labb C ^a  

^a INSA DE RENNES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DISTRIBUTED BRAGG REFLECTORS; MICROCAVITY; TRANSFER MATRIX METHOD; VERTICAL CAVITY SURFACE EMITTING LASERS (VCSEL);

DIELECTRIC MATERIALS; LASERS; MAGNETRON SPUTTERING; MATRIX ALGEBRA; REFLECTION; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTOR QUANTUM WELLS; SILICON NITRIDE;

AMORPHOUS SILICON;

EID: 25144436901     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2009075     Document Type: Article

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