CW laser crystallization of amorphous silicon; dependence of amorphous silicon thickness and pattern width on the grain size

Thin Solid Films

Volumn 511-512, Issue , 2006, Pages 243-247

  Park, Seong Jin ^a,b   Ku, Yu Mi ^a   Kim, Ki Hyung ^a   Kim, Eun Hyun ^a   Choo, Byung Kwon ^a   Choi, Jung Su ^a   Kang, Sang Hoon ^b   Lim, Young Jin ^b   Jang, Jin ^a  

^a Kyung Hee University   (South Korea)

^b BOE HYDIS Technology Co Ltd   (South Korea)

Author keywords

CLC; Large grain; Poly Si; Solar cell

Indexed keywords

CONTINUOUS WAVE LASERS; CRYSTALLIZATION; ENERGY ABSORPTION; GRAIN SIZE AND SHAPE; SOLAR CELLS; THIN FILMS;

CLC; LARGE GRAIN; LASER ENERGY INTENSITY; SI ISLAND;

AMORPHOUS SILICON;

EID: 33646553357     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.12.143     Document Type: Article

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