Optimization of layered laser crystallization for thin-film crystalline silicon solar cells

Solar Energy Materials and Solar Cells

Volumn 74, Issue 1-4, 2002, Pages 295-303

  Sinh, Ngo Duong ^a   Andrä, Gudrun ^a   Falk, Fritz ^a   Ose, Ekkehart ^a   Bergmann, Joachim ^a  

^a LEIBNIZ INSTITUTE OF PHOTONIC TECHNOLOGY   (Germany)

Author keywords

Crystalline silicon thin film; Laser crystallization; Laser induced epitaxy; Plasma enhanced chemical vapor deposition (PE CVD); Silicon thin film solar cells

Indexed keywords

AMORPHOUS SILICON; CRYSTALLINE MATERIALS; CRYSTALLIZATION; EPITAXIAL GROWTH; LASER BEAM EFFECTS; LASER PULSES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THIN FILMS;

LASER CRYSTALLIZATIONS;

SILICON SOLAR CELLS;

EID: 0036778149     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0927-0248(02)00088-0     Document Type: Article

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