A simple explanation on the crystallization kinetics of a CW laser crystallization of amorphous silicon

Materials Research Society Symposium Proceedings

Volumn 808, Issue , 2004, Pages 637-642

  Park, Seong Jin ^a   Kang, Sang Hoon ^a   Ku, Yu Mi ^a   Jang, Jin ^a  

^a Kyung Hee University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CONTINUOUS WAVE LASERS; CRYSTALLIZATION; DEHYDROGENATION; GRAIN SIZE AND SHAPE; MICROSTRUCTURE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYSILICON; SCANNING; SCANNING ELECTRON MICROSCOPY; SOLIDIFICATION; THERMAL EFFECTS;

CRYSTALLIZATION KINETICS; CW LASER CRYSTALLIZATION; SEQUENTIAL LAYER CRYSTALLIZATION; SEQUENTIAL LAYER SOLIDIFICATION (SLS);

AMORPHOUS SILICON;

EID: 12744277369     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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