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Volumn 31, Issue 3, 2005, Pages 165-168
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High performance LTPS TFT with very large grains produced by sequential lateral crystallization
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Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHOUS SILICON;
CRYSTALLIZATION;
ELECTRIC PROPERTIES;
GRAIN SIZE AND SHAPE;
LASER APPLICATIONS;
MICROSTRUCTURE;
CRYSTALLIZATION PROCESS;
GLASS CRYSTALLIZATION;
LASER SCANNING;
STRUCTURAL PROPERTIES;
POLYSILICON;
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EID: 25644437144
PISSN: 12860042
EISSN: None
Source Type: Journal
DOI: 10.1051/epjap:2005057 Document Type: Article |
Times cited : (8)
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References (16)
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