OES study of the gas phase during diamond films deposition in high power DC arc plasma jet CVD system

Chinese Physics

Volumn 15, Issue 5, 2006, Pages 980-984

  Zhou, Zu Yuan ^a   Chen, Guang Chao ^a   Tang, Wei Zhong ^a   Lü, Fan Xiu ^a  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY BEIJING   (China)

Author keywords

Diamond film; Gas phase; High power DC arc plasma jet CVD; OES

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIAMOND FILMS; ELECTRIC CURRENTS; EMISSION SPECTROSCOPY; PLASMA JETS;

GAS PHASE; HIGH POWER DC ARC PLASMA JET CVD; OES;

PHASE EQUILIBRIA;

EID: 33646510765     PISSN: 10091963     EISSN: 17414199     Source Type: Journal    
DOI: 10.1088/1009-1963/15/5/019     Document Type: Article

References (20)

1. Harris S J, Weiner A M and Perry T A 1988 Appl. Phys. Lett. 53 1605
2. Weiner W A, Cerio F M and Johnson C E 1991 J. Mater. Res. 6 2134
3. Snail K A and Hanssen L M 1991 J. Cryst. Growth 112 651
4. Ohtake N and Yoshikawa M 1990 J. Electrochem. Soc. 137 717
5. Hsu W L 1991 Appl. Phys. Lett. 59 1427
6. Celii F G and Butler J E 1992 J. Appl. Phys. 71 2877
7. Meler U, Kohse-Hoinghaus K, Schafer L and Klages C P 1990 Appl. Opt. 29 4993
8. Celii F G, Pehresson P E, Wang H T and Butler J E 1988 Appl. Phys. Lett. 52 2043
9. Locher R and Wild C 1994 Appl. Phys. Lett. 65 34
10. Liao Y, Li C H, Ye Z Y, Chang C, Wang G Z and Fang R C 2000 Diam. and Relat. Mater. 9 1716
11. Stalder K R and Sharpless R L 1990 J. Appl. Phys. 68 6187
12. Cubertafon J C, Chenevier M, Campargue A, Priem T and Verven G 1995 Diam. and Relat. Mater. 4 350
13. Lu F X, Tang W Z, Zhong G F, Huang T B, Liu J M, Li G H, Lo T L, Zhang Y G and Sun Z L 2000 Diam. and Relat. Mater. 9 1655
14. Kampas F T 1983 J. Appl. Phys. 54 1983
15. McMaster M C, Hsu W L, Coltrin M E and Dandy D S 1994 J. Appl. Phys. 76 7576
16. Corat E J and Goodwin D G 1993 J. Appl. Phys. 74 2021
17. Huang T B, Tang W Z and Lu F X 2005 Surface & Coatings Technology 190 48
18. Lu F X, Huang T B, Tang W Z and Liu J M 2002 Inter. J. Mod. Phys. B 16 887
19. Lu F X, Tang W Z, Huang T B, Liu J M, Song J H, Yu W X and Tong Y M 2001 Diam. Relat. Mater. 9 1551
20. Lu F X, Zhong G F, Sun J G, Fu Y L, Tang W Z, Wang J J, Li G H, Zang J M and Pan C H 1998 Diam. Relat. Mater. 7/6 737