Numerical prediction of the influence of process parameters on large area diamond deposition by DC arcjet with arc roots rotating and operating at gas recycling mode

International Journal of Modern Physics B

Volumn 16, Issue 6-7, 2002, Pages 887-894

  Lu, F X ^a   Huang, T B ^a   Tang, W Z ^a   Song, J H ^a   Tong, Y M ^a  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY BEIJING   (China)

Author keywords

[No Author keywords available]

Indexed keywords

DIAMOND;

CALCULATION; COMPUTER MODEL; CONFERENCE PAPER; DATA BASE; DRY DEPOSITION; FLOW RATE; GAS ANALYSIS; GEOMETRY; OPERATOR; PLASMA; PREDICTION; ROTATION; TEMPERATURE DEPENDENCE; THERMODYNAMICS;

EID: 0037139082     PISSN: 02179792     EISSN: None     Source Type: Journal    
DOI: 10.1142/s0217979202010567     Document Type: Conference Paper

References (16)