Economical deposition of a large area of high quality diamond film by a high power DC arc plasma jet operating in a gas recycling mode

Diamond and Related Materials

Volumn 9, Issue 9, 2000, Pages 1655-1659

  Lu, F X ^a   Tang, W Z ^a   Zhong, G F ^a   Huang, T B ^a   Liu, J M ^a   Li, G H ^b   Lo, T L ^b   Zhang, Y G ^b   Sun, Z L ^b   Du, S M ^b   He, Q Y ^b   Wang, S I ^b  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY BEIJING   (China)

^b INSTITUTE OF ENERGY RESOURCES   (China)

Author keywords

[No Author keywords available]

Indexed keywords

INFRARED SPECTROSCOPY; OPTICAL PROPERTIES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMA JETS; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SYNTHESIS (CHEMICAL); TRANSPARENCY; X RAY DIFFRACTION ANALYSIS;

DIAMOND WAFERS; GAS RECYCLING;

DIAMOND FILMS;

EID: 0034275542     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(00)00305-8     Document Type: Article

References (8)

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2. W.D. Partlow, J. Schreurs, R.M. Young et al., Application of Diamond Film and Related Materials, in: A. Feldman et al, (Eds.), NIST Special Publications 885, USA, 1995, pp. 519.
3. F.X. Lu, G.F. Zhong, L. Wang et al., Proceedings of the International Diamond Symposium Seoul, 1996, p. 115.
4. F.X. Lu G.F. Zhong J.G. Sun Diamond Relat. Mater. 7/6 1998 737
5. I.A. Martorell W.D. Partlow R.M. Young J.J. Schreurs H.E. Saunders Diamond Relat. Mater. 8 1999 29 36
6. G.F. Zhong, W.Z. Tang, F.Z..Shen, W.X. Yu, Y.M. Tong, F.X. Lu, Proceedings of the Third Pacific Rim Conference on Advanced Materials and Processing, Hawaii, USA, July 15–18, 1998, pp. 2941.
7. F.X. Lu, W.Z. Tang, G.F. Zhong et al., to be presented at ADC/FCT’99 conference, Tsukuba, Aug. 30–Sept. 3, Japan, 1999.
8. G.F. Zhong, Ph.D thesis, University of Science and Technology Beijing, 1998