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Volumn 88, Issue 17, 2006, Pages
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Ferroelectric and reliability properties of metal-organic chemical vapor deposited Pb(Zr0.15Ti0.85) O3 thin films grown in the self-regulation process window
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
CRYSTALLINE MATERIALS;
ELECTROCHEMICAL ELECTRODES;
IRIDIUM;
LEAD;
POLARIZATION;
RELIABILITY;
RELIABILITY THEORY;
THIN FILMS;
X RAY PHOTOELECTRON SPECTROSCOPY;
FERROELECTRIC PERFORMANCE;
PIR;
PRECURSOR INPUT RATIO;
SELF-REGULATION PROCESS WINDOW;
FERROELECTRIC CERAMICS;
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EID: 33646410984
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.2198487 Document Type: Article |
Times cited : (8)
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References (8)
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