An XYZ Micromanipulator with three translational degrees of freedom

Robotica

Volumn 24, Issue 3, 2006, Pages 305-314

  Jensen, Kimberly A ^a   Lusk, Craig P ^a   Howell, Larry L ^a  

^a Department of Electrical and Computer Engineering   (United States)

Author keywords

Three inputs; Translational DOFs; XYZ Micromanipulator

Indexed keywords

LINEAR SYSTEMS; MICROMACHINING; MICROMETERS; SURFACE PROPERTIES;

THREE INPUTS; TRANSLATIONAL DOFS; XYZ MICROMANIPULATOR;

MICROMANIPULATORS;

EID: 33646404671     PISSN: 02635747     EISSN: 14698668     Source Type: Journal    
DOI: 10.1017/S0263574705002134     Document Type: Article

References (24)

1. E. Oilier, C. Charbrol, T. Enot, P. Branet-Manquat, J. Margail and P. Mottier, "1 × 8 Micro-Mechanical Switches based on moving waveguides for Optical Fiber Network Switching," Proceedings 2000 IEEE/LEOS International Conference on Optical MEMS, Kauai, HI (Aug., 2000) pp. 39-40.
2. M. C. Wu, "Micromachining for Optical and Optoelectronic Systems." Proceedings of the IEEE (Nov., 1987) Vol. 85, No 11, pp. 1833-1856.
3. C. R. King, L. Y. Lin and M. C. Wu, "Out-of-Plane Refractive Microlens Fabricated by Surface Micromachining," IEEE Photonics Technology Letters 8, No 10, 1349-1359 (Oct., 1996).
4. M. E. Motamedi, M. C. Wu and K. S. J. Pister, "Micro-opto-electro- mechanical devices and on-chip optical processing" Optical Engineering 36, No 5, 1282-1297 (May, 1997).
5. L. Y. Ein, S. S. Lee, K. S. J. Pister and M. C. Wu, "Micro-Machined Three-Dimensional Micro-Optics for Integrated Free-Space Optical System," IEEE Photonics Technology Letters 6. No 12, 1445-1447 (Dec., 1994).
6. C. Marxer, C. Thio, M. Gretillat and N. de Rooij,"Vertical Mirrors Fabricated by Deep Reactive Ion Etching for Fiber-optic Switching Applications," Journal of Microelectromechanical Systems 6, No 3, 277-285 (Sept., 1997).
7. H. Nguyen, J. G. Su, H. Toshiyoshi and M. C. Wu, "Device Transplant of Optical MEMS of Out of Plane Beam Steering," Proceedings of the Fourteenth IEEE International Conference on Micro Electro Mechanical Systems (2001) pp. 325-328.
8. Y. Lin, E. L. Goldstein, L. M. Eunardi and R. W. Tkach, "1999 Micromachined Optical-Switching Technologies for WDM networks," Proceedings of the 1999 IEEE/LEOS Summer Topical Meeting on Nanostructures and Quantum Dots (July 26-July 27, 1999) pp. 57-58.
9. R. T. Chen, H. Nguyen and M. C. Wu, "A High Speed Low-Voltage Stress-Induced Micromachined 2 × 2 Optical Switch," IEEE Photonics Technology Letters 11, No 11, 1396-1398 (Nov., 1999).
10. S. S. Lee, L. Y. Lin and M. C. Wu, '"Surface Micromachined free-space micro-optical systems containing three-dimensional microgratings," Applied Physics Letters 67, No 15, 2135-2137 (9 Oct., 1995).
11. L. W. Tsai and R. Stamper, "A Parallel Manipulator with Only Translational Degrees of Freedom," '96-DETC-MECH-1152,
12. ASME 1996 Design Engineering Technical Conferences, Irvine, CA (1996) pp. 1-8.
13. L. W. Tsai, Robot Analysis, The Mechanics of Serial and Parallel Manipulators (John Wiley and Sons, Inc. New York, 1999).
14. D. Kim and W. K. Chung, '"Kinematic Condition Analysis of Three-DOF Pure Translational Parallel Manipulators," Journal of Mechanical Design 125, 323-331 (June, 2003).
15. J. J. Parise, L. L. Howell and S. P. Magleby, "Ortho-Planar Mechanisms," Proceedings of the ASME Design Engineering Technical Conferences and Computers and Information in Engineering Conference, Baltimore, Maryland (Sept. 10-13, 2000) pp. 1-8.
16. D. A. Koester, A. Cowen, R. Mahadevan, M. Stonefield and B. Hardy, PolyMUMPS Design Handbook, Revision 10.0 (MEMSCAP, 2003).
17. J. J. Sniegowski and M. P. de Boer, '"IC-compatihle Polysilicon Surface Micromachining," Ann. Rev. Mater. Sci. 30, 299-333 (2000).
18. D. Clements, L. L. Howell, N. Masters and B. Weight, "Floating Pin Joints Fabricated from Two Eayers of Polysilicon at the Micro Level," Tenth World Conference on the Theory of Machines and Mechanisms, Oulu, Finland (June 20-24, 1999) Vol. 2, pp. 874-879.
19. R. Yeh, E. J. J. Kniglick and K. S. J. Pister, "Surface Micromachined Components for Articulated Microrobots," Journal of Microelectromechanical Systems 5, No 1, 10-17 (March, 1996).
20. A. Friedberger and R. S. Muller, "Improved Surface Micromachined Hinges for Fold-Out Structures," Journal of Microelectromechanical Systems 7. No 3, 315-319 (Sept., 1998).
21. Y. W. Yi and C. Liu, "Magnetic Actuation of Hinged Microstructures," Journal of Microelectromechanical Systems 8, No 1, 10-17 (March, 1999).
22. C. M. Bender and S. A. Orszag, Advanced Mathematical Methods for Scientists and Engineers (McGraw-Hill Book Company, United States of America, 1978).
23. L. L. Howell, Compliant Mechanisms (John Wiley and Sons, Inc., New York, 2001).
24. K. A. Jensen, C. P. Lusk and L. L. Howell, "Force Relationships for an XYZ Micromanipulator with Three Translational Degrees of Freedom," Proceedings of the 2004 ASME Mechanisms and Robotics Conference, DETC 2004-57028(2004) pp. 1-8.