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Volumn 100, Issue 5, 2006, Pages 4240-4246
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A novel positive-type photosensitive polyimide based on soluble block copolyimide showing low dielectric constant with a low-temperature curing process
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Author keywords
Lithography; Polyimides; Refractive index; Thermal properties
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Indexed keywords
CATALYSTS;
LITHOGRAPHY;
OPTICAL PROPERTIES;
PERMITTIVITY;
POLYCONDENSATION;
POLYIMIDES;
REFRACTIVE INDEX;
SENSITIVITY ANALYSIS;
SUPERCONDUCTING TRANSITION TEMPERATURE;
BLOCK COPOLYIMIDE;
THERMAL PROPERTIES;
THERMAL TRANSMISSION TEMPERATURE;
TRANSPARENT FILMS;
BLOCK COPOLYMERS;
BLOCK COPOLYMER;
CATALYST;
CONDENSATION POLYMER;
DIELECTRIC PROPERTY;
POLYIMIDE;
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EID: 33646357472
PISSN: 00218995
EISSN: 10974628
Source Type: Journal
DOI: 10.1002/app.23806 Document Type: Article |
Times cited : (32)
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References (21)
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