Positive-working alkaline-developable photosensitive polyimide precursor based on polyisoimide using diazonaphthoquinone as a dissolution inhibitor

Polymer

Volumn 36, Issue 11, 1995, Pages 2153-2158

  Mochizuki, Amane ^a   Teranishi, Tadashi ^a   Ueda, Mitsuru ^a   Matsushita, Koichi ^a  

^a YAMAGATA UNIVERSITY   (Japan)

Author keywords

dissolution behaviour; polyimide precursor; polyisoimide

Indexed keywords

ADDITION REACTIONS; CHEMICAL MODIFICATION; DISSOLUTION; ORGANIC SOLVENTS; PHOTOCHEMICAL REACTIONS; PLASTIC FILMS; SOLUBILITY; TRANSPARENCY; ULTRAVIOLET LAMPS;

DISSOLUTION RATE; N METHYL 2 PYRROLIDONE; PHOTOREACTIVE COMPOUNDS; POLYIMIDE PRECURSOR; POLYISOIMIDE; RING OPENING POLYADDITION REACTION; TRIFLUOROACETIC ANHYDRIDE TRIETHYLAMINE;

POLYIMIDES;

EID: 0029305858     PISSN: 00323861     EISSN: None     Source Type: Journal    
DOI: 10.1016/0032-3861(95)95290-H     Document Type: Article

References (15)

1. New Photosensitive High Temperature Polymers for Electronic Applications
2. A new positive-type photoreactive polyimide precursor using 1,4-dihydropyridine derivative
3. Advances in Resist Technology and Processing VI