P-type activation of AlGaN by hydrogen desorption using catalytic Ni films

Applied Physics Letters

Volumn 88, Issue 15, 2006, Pages

  Naono, T ^a   Fujioka, H ^b,c   Okabayashi, J ^a   Oshima, M ^a   Miki, H ^d  

^a UNIVERSITY OF TOKYO   (Japan)

^b INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^c KANAGAWA ACADEMY OF SCIENCE AND TECHNOLOGY   (Japan)

^d High Performance Materials Department   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; DESORPTION; HYDROGEN; NICKEL; SECONDARY ION MASS SPECTROMETRY;

HOLE CONCENTRATIONS; HYDROGEN DESORPTION; THERMAL DESORPTION SPECTROSCOPY;

SEMICONDUCTING ALUMINUM COMPOUNDS;

EID: 33646159055     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2191827     Document Type: Article

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