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Volumn 200, Issue 22-23 SPEC. ISS., 2006, Pages 6308-6312

Thermal decomposition of Zr1 - xAlxN thin films deposited by magnetron sputtering

Author keywords

Morphology; Thermal stability; Thin films; ZrAlN

Indexed keywords

ANNEALING; ATOMIC FORCE MICROSCOPY; COMPOSITION; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; PYROLYSIS; THERMODYNAMIC STABILITY; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; ULTRAHIGH VACUUM; X RAY DIFFRACTION ANALYSIS;

EID: 33646138005     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.11.113     Document Type: Article
Times cited : (45)

References (19)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.