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Volumn 200, Issue 22-23 SPEC. ISS., 2006, Pages 6308-6312
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Thermal decomposition of Zr1 - xAlxN thin films deposited by magnetron sputtering
a
EPFL
(Switzerland)
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Author keywords
Morphology; Thermal stability; Thin films; ZrAlN
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Indexed keywords
ANNEALING;
ATOMIC FORCE MICROSCOPY;
COMPOSITION;
MAGNETRON SPUTTERING;
MECHANICAL PROPERTIES;
PYROLYSIS;
THERMODYNAMIC STABILITY;
THIN FILMS;
TRANSMISSION ELECTRON MICROSCOPY;
ULTRAHIGH VACUUM;
X RAY DIFFRACTION ANALYSIS;
STRUCTURAL EVOLUTION;
STRUCTURAL MODIFICATION;
TWO-PHASE SYSTEM;
X-RAY ENERGY DISPERSIVE SPECTROMETRY;
ZIRCONIUM COMPOUNDS;
ANNEALING;
ATOMIC FORCE MICROSCOPY;
COMPOSITION;
MAGNETRON SPUTTERING;
MECHANICAL PROPERTIES;
PYROLYSIS;
THERMODYNAMIC STABILITY;
THIN FILMS;
TRANSMISSION ELECTRON MICROSCOPY;
ULTRAHIGH VACUUM;
X RAY DIFFRACTION ANALYSIS;
ZIRCONIUM COMPOUNDS;
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EID: 33646138005
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2005.11.113 Document Type: Article |
Times cited : (45)
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References (19)
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