Study of pillar microstructure formation with anodic oxides

Thin Solid Films

Volumn 324, Issue 1-2, 1998, Pages 1-10

  Vorobyova, A I ^a   Outkina, E A ^a  

^a BELARUSIAN STATE UNIVERSITY OF INFORMATICS AND RADIOELECTRONICS   (Belarus)

Author keywords

Aluminium oxide; Anodic oxidation; Growth mechanism; Tantalum

Indexed keywords

ALUMINA; ALUMINUM; ANODIC OXIDATION; CERAMIC MATERIALS; CRYSTAL MICROSTRUCTURE; ELECTRON MICROSCOPY; FILM GROWTH; POROUS MATERIALS; SILICON; TANTALUM; THIN FILMS;

ANODIC OXIDES; PILLAR MICROSTRUCTURE;

METALLIC FILMS;

EID: 0032123158     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)01194-2     Document Type: Article

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