Laser-nanostructure interactions and applications for parallel nanomanufacturing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6107, Issue , 2006, Pages

  Battula, Arvind ^a   Shao, Dongbing ^a   Lu, Yi ^a   Chen, Shaochen ^a  

^a The University of Texas at Austin   (United States)

Author keywords

Laser; Lithography; Nanofabrication; Near field enhancement; Photothermal imprinting; Surface plasmon

Indexed keywords

INTEGRATED CIRCUIT LAYOUT; LASER APPLICATIONS; LASER BEAMS; LITHOGRAPHY; MICROELECTRONICS; NANOTECHNOLOGY; PHOTOLITHOGRAPHY; PULSED LASER APPLICATIONS; SUBSTRATES;

NEAR FIELD ENHANCEMENT; PARALLEL NANOMANUFACTURING; PARALLEL PATTERNING; PHOTOTHERMAL IMPRINTING; SURFACE PLASMON;

NANOSTRUCTURED MATERIALS;

EID: 33645978709     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.648735     Document Type: Conference Paper

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