Depth-resolved strain measurements in thin films by energy-variable X-ray diffraction

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 246, Issue 1, 2006, Pages 244-248

  Zolotoyabko, E ^a   Pokroy, B ^a   Cohen Hyams, T ^a   Quintana, J P ^b  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

^b NORTHWESTERN UNIVERSITY   (United States)

Author keywords

Residual strains; Synchrotron radiation; Thin films; X ray diffraction

Indexed keywords

DIFFRACTION; ELECTRODEPOSITION; POLYCRYSTALLINE MATERIALS; STRAIN; STRAIN MEASUREMENT; SYNCHROTRON RADIATION; X RAY DIFFRACTION;

DEPTH-RESOLVED STRAIN MEASUREMENTS; ELECTRO-DEPOSITION; ENERGY-VARIABLE X-RAY DIFFRACTION; RESIDUAL STRAINS; X-RAY PENETRATION;

THIN FILMS;

EID: 33645940255     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.12.031     Document Type: Article

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