New theoretical approach to the RF-dynamics of soft magnetic FeTaN films for CMOS components

Journal of Magnetism and Magnetic Materials

Volumn 278, Issue 1-2, 2004, Pages 200-207

  Seemann, K ^a   Leiste, H ^a   Bekker, V ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

High frequency permeability; Spin dynamics; Thin magnetic films

Indexed keywords

CMOS INTEGRATED CIRCUITS; EDDY CURRENTS; MAGNETIC ANISOTROPY; MAGNETIC PERMEABILITY; MAGNETRON SPUTTERING; MATHEMATICAL MODELS; MAXWELL EQUATIONS; NITROGEN; SILICON NITRIDE; SOFT MAGNETIC MATERIALS;

HIGH FREQUENCY PERMEABILITY; SPIN DYNAMICS;

MAGNETIC THIN FILMS;

EID: 2942538159     PISSN: 03048853     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmmm.2003.11.402     Document Type: Article

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