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Journal of Applied Physics

Volumn 85, Issue 8 II A, 1999, Pages 4898-4900

Fabrication of thin film inductors using FeTaN soft magnetic films

(5) Lee, Chang Ho a Shin, Dong Hoon a Ahn, Dong Hoon a,b Nam, Seoung Eui a Kim, Hyoung June a

a Hong Ik University (South Korea)

b LG Electronics Inc (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; AUGER ELECTRON SPECTROSCOPY; COERCIVE FORCE; GRAIN GROWTH; IRON ALLOYS; MAGNETIC ANISOTROPY; MAGNETIC PERMEABILITY; MAGNETOSTRICTION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SOFT MAGNETIC MATERIALS; SPUTTER DEPOSITION; TRANSMISSION ELECTRON MICROSCOPY;

AIR-CORE INDUCTORS; FREQUENCY-LIMITED PERMEABILITY; PLANAR-TYPE THIN FILM INDUCTORS;

MAGNETIC THIN FILMS;

EID: 0032614562 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.369135 Document Type: Article

Times cited : (26)

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