Investigation of a rf inductively coupled plasma ion source capable of highly uniform and collimated ion-beam generation

Review of Scientific Instruments

Volumn 77, Issue 3, 2006, Pages

  Kanarov, V ^a   Hayes, A ^a   Yevtukhov, R ^a   Kameyama, I ^a   Siegfried, D ^a   Whlin, E ^a  

^a VEECO INSTRUMENTS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIAMETER WAFER; DIVERGENCE ANGLE; HIGH DIRECTIONALITY; PLASMA DENSITY DISTRIBUTION; PLASMA GENERATOR; RADIAL PLASMA DENSITY UNIFORMITY; RF ION SOURCE; STATIC ETCH UNIFORMITY;

ION BEAMS; MAGNETIC FIELDS; MAGNETIC HEADS; PLASMAS; SENSORS;

ION SOURCES;

EID: 33645828220     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2172349     Document Type: Article

References (19)

1. V. Kanarov (patent pending).
2. E. Wåhlin (unpublished).
3. A. T. Forrester, Large Ion Beams: Fundamentals of Generation and Propagation (Wiley, New York, 1987).
4. High Density Plasma Sources, edited by, O. A. Popov, (Noyes, Oceanville, NJ, 1995).
5. V. Kanarov, A. V. Hayes, R. Yevtukhov, B. Vidinsky, and A. Navy, Rev. Sci. Instrum. 69, 874 (1998).
6. A. V. Hayes, V. Kanarov, R. Yevtukhov, H. Hegde, B. Druz, D. Yakolevitch, W. Cheesman, and V. Mirkov, Rev. Sci. Instrum. 71, 1163 (2000).
7. D. Siegfried, B. Buchholtz, D. Burtner, and W. Foster, Rev. Sci. Instrum. 71, 1029 (2000).
8. J. A. Stittsworth, and A. E. Wendt, Plasma Sources Sci. Technol. 5, 429 (1996).
9. E. F. Jaeger, L. A. Berry, J. S. Tolliver, and D. B. Batchelor, Phys. Plasmas 2, 2597 (1995).
10. A. J. Lamm, J. Vac. Sci. Technol. A 15, 2615 (1997).
11. J. Lu, and M. J. Kushner, Plasma Sources Sci. Technol. 10, 502 (2001).
12. A. Simon, An Introduction to Thermonuclear Research (Pergamon, New York, 1959), pp. 150-177.
13. R. Hieronymi, and S. Hurwitt, US Patent No. 5, 391, 281 (1995).
14. V. Godyak, and R. B. Piejak, J. Appl. Phys. 82, 5944 (1997).
15. J. D. Evans, and F. F. Chen, Phys. Rev. Lett. 86, 5502 (2001).
16. V. A. Godyak, Bulg. J. Phys. 27, 13 (2000).
17. V. A. Godyak, Plasma Phys. Controlled Fusion 45, A399 (2003).
18. F. F. Chen, Phys. Plasmas 8, 3008 (2001).
19. P. D. Reader, D. P. White, and G. C. Isaacson, J. Vac. Sci. Technol. 15, 1093 (1978).