Ion source for ion beam deposition employing a novel electrode assembly

Review of Scientific Instruments

Volumn 71, Issue 2 II, 2000, Pages 1163-1167

  Hayes, A V ^a   Kanarov, V ^a   Yevtukhov, R ^a   Hegde, H ^a   Druz, B ^a   Yakovlevitch, D ^a   Cheesman, W ^a   Mirkov, V ^a  

^a VEECO INSTRUMENTS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0010446096     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1150416     Document Type: Article

References (21)

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