Thirty-five centimeter diameter radio frequency ion-beam source

Review of Scientific Instruments

Volumn 69, Issue 2, 1998, Pages 874-876

  Kanarov, V ^a   Hayes, A V ^a   Yevtukhov, R ^a   Vidinsky, B ^a   Navy, A ^a  

^a VEECO INSTRUMENTS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0005912334     PISSN: 00346748     EISSN: 10897623     Source Type: Journal    
DOI: 10.1063/1.1148742     Document Type: Conference Paper

References (10)

1. H. W. Loeb, J. Freisinger, K. H. Groh, and A. Scharmann, 39th Congress of the International Astronautical Federation, Bangalore, India, 8–15 October 1988, Paper No. IAF-88-258.
2. A. Hayes and E. Ostan, 40th National Symposium of the American Vacuum Society, Orlando, Florida (1993), Paper No. VT-WeP 15, Abstract 1138.
3. A. Hayes, J. Weldon, E. Ostan, and R. J. Gambino, Data Storage 2, 42 (1995).
4. B. Druz, S. DiStefano, A. Hayes, E. Ostan, K. Williams, and L. Wang, Surf. Coat. Technol. SCTEEJ 86–87, 708 (1996).
5. B. Druz, V. I. Polyakov, E. Ostan, A. Hayes, A. I. Rukovishnickov, N. M. Rossukanyi, and A. V. Khomich, Mater. Res. Soc. Symp. Proc. MRSPDH 446, 413 (1997).
6. A. Hayes and E. Ostan, Semicond. Int. SITLDD 8, 160 (1996).
7. G. Aston, H. R. Kaufman, and P. J. Wilbur, J. AIAA 16, 516 (1978).
8. J. R. Kahn, H. R. Kaufman, C. A. Phillips, and R. S. Robinson, J. Vac. Sci. Technol. A JVTAD6 14, 2106 (1996).
9. V. Polyakov, B. L. Druz, A. V. Karabutov, N. M. Rossukanyi, A. I. Rukovishnicov, E. Ostan, A. Hayes, V. D. Frolov, and V. I. Konov, Diamond 97 (8th European Conference on Diamond, Diamondlike Carbon, and Related Materials, Edinburgh, Scotland), 3–8 Aug. 1997.
10. B. Druz, E. Ostan, S. DiStefano, A. V. Hayes, V. Kanarov, V. I. Polyakov, A. I. Rukovishnikov, N. M. Rossukanyi, and A. V. Khomich, J. Diamond Relat. Mater. (accepted).