Vertically laminated magnetic cores by electroplating Ni-Fe into micromachined Si

IEEE Transactions on Magnetics

Volumn 40, Issue 4 II, 2004, Pages 3060-3062

  Arnold, David P ^a   Zana, Iulica ^a   Cros, Florent ^a   Allen, Mark G ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Eddy currents; Magnetic cores; MEMS; Micromachining; Nickel alloys; Permalloy

Indexed keywords

APPROXIMATION THEORY; COMPUTATIONAL GEOMETRY; EDDY CURRENTS; ELECTRIC IMPEDANCE; ELECTROPLATING; ETCHING; FERROMAGNETIC MATERIALS; INDUCTIVELY COUPLED PLASMA; LAMINATES; MAGNETIC FLUX; MICROMACHINING; PHOTORESISTORS; RELIABILITY; SILICON; SILICON WAFERS; THERMAL EFFECTS;

LAMINATED CORES; MICRO-MOTORS; PERMALLOY; SEED LAYERS;

MAGNETIC CORES;

EID: 4444260998     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2004.829013     Document Type: Article

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