A sacrificial layer approach to highly laminated magnetic cores

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 380-383

  Park, Jin Woo ^a   Cros, Florent ^a   Allen, Mark G ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; ELECTRIC INSULATION; ELECTROPLATING; LAMINATED COMPOSITES; MAGNETIC CORES; NICKEL COMPOUNDS; PHOTOLITHOGRAPHY;

INSULATING LAYERS; LAMINATED MAGNETIC CORES; MAGNETIC CORE FABRICATION;

MICROELECTRONIC PROCESSING;

EID: 0036120524     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. Microfabrication of transformers and inductors for high frequency power conversion
2. A microfabricated transformer for high-frequency power or signal conversion
3. Batch-fabricated microinductors with electroplated magnetically anisotropic and laminated alloy cores
4. Microfabrication process for high-frequency power-conversion transformers
5. Fabrication of high current and low profile micromachined inductor with laminated Ni/Fe core
6. In situ fabrication of sacrificial layer in electrodeposited NiFe micro-structures
7. Pulsed electrodeposition of copper/nickel multilayers on rotation disk electrodes