Fabrication of high current and low profile micromachined inductor with laminated Ni/Fe core

IEEE Transactions on Components and Packaging Technologies

Volumn 25, Issue 1, 2002, Pages 106-111

  Park, Jin Woo ^b   Park, Jae Yeong ^a,b,c   Joung, Yeun Ho ^b   Allen, Mark G ^a,b  

^a IEEE

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^c LG   (South Korea)

Author keywords

Eddy current; Inductance; Lamination; Microinductor; Micromachining; Saturation current

Indexed keywords

ELECTRIC CURRENTS; ELECTRIC RESISTANCE; ELECTRIC WINDINGS; ELECTRODEPOSITION; EPOXY RESINS; FABRICATION; INDUCTANCE; LAMINATES; MICROMACHINING; NICKEL; PHOTORESISTS;

MICROMACHINED INDUCTORS;

ELECTRIC INDUCTORS;

EID: 0036505594     PISSN: 15213331     EISSN: None     Source Type: Journal    
DOI: 10.1109/6144.991182     Document Type: Article

References (9)

1. A comparison of two micromachined inductors (bar- and meander-type) for fully integrated boost dc/dc power converters
2. High current integrated microinductors and microtransformers using low temperature fabrication processes
3. A comparison of micromachined inductors with different magnetic core materials
4. 3-D microfabricated toroidal planar inductors with different magnetic core schemes for MEMS and power electronic applications
5. Microfabrication process for high-frequency power-conversion transformers
6. Study of thin film micro transformer with high operating frequency and coupling coefficient
7. A microfabricated transformer for high-frequency power or signal conversion
8. High-frequency behavior of laminated iron-core inductors for filtering applications