Cryogenic two-photon laser photolithography with SU-8

Applied Physics Letters

Volumn 88, Issue 14, 2006, Pages

  Lee, Kwan H ^a   Green, Alex M ^a   Taylor, Robert A ^a   Sharp, David N ^a   Turberfield, Andrew J ^a   Brossard, Frederic S F ^b   Williams, David A ^b   Briggs, G Andrew D ^a  

^a UNIVERSITY OF OXFORD   (United Kingdom)

^b HITACHI CAMBRIDGE LABORATORY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; CRYOGENICS; PHOTONS; SEMICONDUCTOR MATERIALS; SEMICONDUCTOR QUANTUM DOTS; SPECTROSCOPIC ANALYSIS;

ALIGNMENT MARKERS; CRYOGENIC TEMPERATURES; RANDOMLY DISTRIBUTED STRUCTURES; TWO-PHOTON LASER PHOTOLITHOGRAPHY;

PHOTOLITHOGRAPHY;

EID: 33645690107     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2194311     Document Type: Article

References (13)

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