Experimental investigations of pulse-power-modulated inductive discharges

Journal of the Korean Physical Society

Volumn 48, Issue 3, 2006, Pages 414-421

  Seo, Sang Hun ^a   Chang, Hong Young ^a   Yang, Woong Cheol ^b   Kwon, Joon Hyuk ^b   Kim, Dong Ho ^b   Kim, Yoon Young ^b   Nam, Jae Hyun ^b   Moon, Sung Jin ^b  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Korea Science Academy   (South Korea)

Author keywords

Duty cycle; EEDF; Pulsed ICP; Time resolved probe measurement

Indexed keywords

EID: 33645537533     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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