rf microelectromechanical system device with a lateral field-emission detector

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 2, 2006, Pages 927-931

  Yamashita, Kiyotaka ^a   Sun, Winston ^a   Kakushima, Kuniyuki ^b   Fujita, Hiroyuki ^a   Toshiyoshi, Hiroshi ^a,c  

^a UNIVERSITY OF TOKYO   (Japan)

^b TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^c KANAGAWA ACADEMY OF SCIENCE AND TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANODES; BANDPASS FILTERS; CATHODES; ELECTRIC POTENTIAL; MICROELECTROMECHANICAL DEVICES; RESONATORS;

ANODE-CATHODE POTENTIAL; FIELD EMISSION DETECTORS; RESONATOR-EMBEDDED (RE) DEVICE; STATIONARY REFERENCE (SR) DEVICE;

FIELD EMISSION DISPLAYS;

EID: 33645528915     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2177231     Document Type: Article

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