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Volumn 45, Issue 1, 1998, Pages 213-217
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Investigation of the low field leakage current mechanism in polysilicon TFT's
a a a a a a |
Author keywords
2 d simulation; Degradation; Density of states; Device modeling; Laser recrystallization; Leakage current; Polysilicon tft's
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Indexed keywords
COMPUTER SIMULATION;
CRYSTALLIZATION;
ELECTRONIC DENSITY OF STATES;
LASER APPLICATIONS;
LEAKAGE CURRENTS;
POLYCRYSTALLINE MATERIALS;
SEMICONDUCTING SILICON;
SEMICONDUCTOR DEVICE MANUFACTURE;
LASER RECRYSTALLIZATION;
THIN FILM TRANSISTORS;
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EID: 0031701878
PISSN: 00189383
EISSN: None
Source Type: Journal
DOI: 10.1109/16.658833 Document Type: Article |
Times cited : (22)
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References (4)
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