Deposition of diamond-like carbon films on polymers by plasma source ion implantation

Thin Solid Films

Volumn 506-507, Issue , 2006, Pages 55-58

  Baba, K ^a   Hatada, R ^a  

^a INDUSTRIAL TECHNOLOGY CENTER OF NAGASAKI   (Japan)

Author keywords

Adhesion; DLC; PSII

Indexed keywords

ADHESION; DEPOSITION; INSULATING MATERIALS; ION IMPLANTATION; PLASMAS; POLYMERS; SILICON WAFERS;

DIAMOND-LIKE CARBON (DLC); FRICTION COEFFICIENTS; PLASMA SOURCE ION IMPLANTATION (PSII); PTFE SUBSTRATE;

DIAMOND LIKE CARBON FILMS;

EID: 33645225995     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.08.072     Document Type: Conference Paper

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