SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 506-507, Issue , 2006, Pages 207-211

Growth responses of ultrathin CNx overcoats to process parameters

(2) Li, D J a,b Chung, Yip Wah b

a TIANJIN NORMAL UNIVERSITY (China)

b Northwestern University (United States)

Author keywords

Carbon nitride; Corrosion; Hard disks; Sputtering

Indexed keywords

CARBON NITRIDE; COATING TECHNIQUES; CORROSION FATIGUE; DEPOSITION; GROWTH (MATERIALS); ION BEAMS; MAGNETRON SPUTTERING; REFLECTION; ROTATION; SUBSTRATES; X RAYS;

PROCESS PARAMETERS; SAMPLING AREAS;

ULTRATHIN FILMS;

EID: 33645224830 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2005.08.013 Document Type: Conference Paper

Times cited : (5)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.