Nano-mechanical electro-thermal probe array used for high-density storage based on NEMS technology

Microelectronics Reliability

Volumn 46, Issue 5-6, 2006, Pages 805-810

  Yang, Zunxian ^a   Yu, Ying ^a   Li, Xinxin ^b   Bao, Haifei ^b  

^a FUZHOU UNIVERSITY   (China)

^b SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; FINITE ELEMENT METHOD; MICROMACHINING; NANOTECHNOLOGY; PLASTIC FILMS; POLYMETHYL METHACRYLATES; PROBES; SILICON; THIN FILMS;

HIGH-DENSITY STORAGE; NANO-MACHINING TECHNOLOGY; NEMS TECHNOLOGY; THERMAL WRITING;

MICROELECTROMECHANICAL DEVICES;

EID: 33645164972     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2005.07.117     Document Type: Conference Paper

References (7)

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