Modification-scanning X-ray microscopy of semiconductor structures using Kumakhov optics

Technical Physics Letters

Volumn 32, Issue 2, 2006, Pages 161-163

  Romanov, A Yu ^a  

^a Institute for Roentgen Optical Systems   (Russian Federation)

Author keywords

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Indexed keywords

EID: 33645158054     PISSN: 10637850     EISSN: None     Source Type: Journal    
DOI: 10.1134/S1063785006020234     Document Type: Article

References (25)

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