Annealing of aluminum-silicon-dioxide-silicon structures after α-particle bombardment

Technical Physics Letters

Volumn 25, Issue 8, 1999, Pages 660-661

  Vasin, S V ^a   Tulvinskii, V B ^a   Shipatov, E T ^a  

^a ULYANOVSK STATE UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033176977     PISSN: 10637850     EISSN: None     Source Type: Journal    
DOI: 10.1134/1.1262589     Document Type: Article

References (7)

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7. V. S. Vavilov, V. F. Kiselev, and B. N. Mukashev, Defects in Silicon and at its Surface [in Russian], Nauka, Moscow (1990), 216 pp.