Anomalous electrical performance of nanoscaled interfacial oxides for bonded n-GaAs wafers

Applied Physics Letters

Volumn 88, Issue 11, 2006, Pages

  Ouyang, Hao ^a   Wu, YewChung Sermon ^b   Chiou, Hsiao Hao ^a   Liu, Chia Cheng ^a   Cheng, Ji Hao ^b   Ouyang, Wen ^c   Chiou, Shan Haw ^d   Shiue, Sham Tsong ^a   Chueh, Y L ^e   Chou, L J ^e  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

^b NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^c CHUNG HUA UNIVERSITY   (Taiwan)

^d INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

^e NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC PROPERTIES; ENERGY DISPERSIVE SPECTROSCOPY; INSULATING MATERIALS; INTERFACIAL ENERGY; NANOSTRUCTURED MATERIALS;

GAAS WAFERS; INTERFACIAL OXIDES; PHASE BONDED INTERFACES;

OXIDES;

EID: 33645149702     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2185611     Document Type: Article

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