Laser-induced Ni(Ti) suicide formation

Applied Physics Letters

Volumn 88, Issue 11, 2006, Pages

  Setiawan, Y ^a,b   Lee, P S ^a   Pey, K L ^c   Wang, X C ^d   Lim, G C ^d  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b CHARTERED SEMICONDUCTOR MANUFACTURING LTD   (Singapore)

^c NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^d SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC PHYSICS; MICROSTRUCTURE; NICKEL; QUENCHING; SOLIDIFICATION;

LASER-INDUCED NI(TI) SUICIDE FORMATION; NI-RICH REGIONS; NISI2 GRAINS;

TITANIUM ALLOYS;

EID: 33645140563     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2186073     Document Type: Article

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