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Volumn 21, Issue 3, 2006, Pages 761-766

Large-grain poly-crystalline silicon thin films prepared by aluminum-induced crystallization of sputter-deposited hydrogenated amorphous silicon

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; AMORPHOUS SILICON; ANNEALING; CRYSTALLIZATION; FILM PREPARATION; HYDROGENATION; MICROANALYSIS; SPUTTER DEPOSITION; SUBSTRATES; THERMAL EFFECTS; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

EID: 33645105785     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2006.0091     Document Type: Article
Times cited : (12)

References (13)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.