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Volumn 200, Issue 18-19, 2006, Pages 5203-5209
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Characterization of cobalt thin films electrodeposited onto silicon with two different resistivities
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Author keywords
Cobalt; Electroplating; Nucleation; Silicon
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
ELECTROPLATING;
GALVANIZING;
MORPHOLOGY;
NUCLEATION;
SILICON;
THIN FILMS;
COBALT THIN FILMS;
GALVANOSTATIC DEPOSITION;
TWO-STEP NUCLEATION;
COBALT;
ATOMIC FORCE MICROSCOPY;
COBALT;
ELECTROPLATING;
GALVANIZING;
MORPHOLOGY;
NUCLEATION;
SILICON;
THIN FILMS;
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EID: 33645102458
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2005.06.005 Document Type: Article |
Times cited : (16)
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References (23)
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