Numerical simulation and comparison of membrane and solidly mounted FBAR's

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 2002, Pages 497-500

  Reinhardt, A ^a   Laude, V ^a   Pastureaud, Th ^a   Ballandras, S ^a  

^a UNIVERSITÉ DE FRANCHE COMTÉ   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC BULK WAVE DEVICES; COMPUTER SIMULATION; ELECTRODES; MATHEMATICAL MODELS; MATRIX ALGEBRA; MEMBRANES; MIRRORS; RESONATORS; THIN FILM DEVICES;

ACOUSTIC MIRROR; HIGH FREQUENCY FILTERS; SOLIDLY MOUNTED RESONATOR; THIN FILM BULK ACOUSTIC RESONATORS;

ULTRASONIC DEVICES;

EID: 0036989458     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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8. K. M. Lakin, "Thin film resonators and filters," in 1999 IEEE Ultrasonics Symposium, 1999, pp. 895-906.