Super-resolution optical inspection for semiconductor defects using standing wave shift

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6049, Issue , 2005, Pages

  Usuki, S ^a   Nishioka, H ^a   Takahashi, S ^a   Takamasu, K ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

Optical inspection; Semiconductor defects; Standing wave shift; Super resolution algorism

Indexed keywords

COMPUTER SIMULATION; CRYSTAL DEFECTS; DIELECTRIC DEVICES; OPTICAL SYSTEMS; PROBLEM SOLVING; SEMICONDUCTOR DEVICES;

OPTICAL INSPECTION; PIEZOELECTRIC ACTUATOR; STANDING WAVE SHIFT; SUPER-RESOLUTION ALGORITHMS;

INSPECTION;

EID: 33645079405     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.648356     Document Type: Conference Paper

References (9)

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