Generation of third and higher-order intermodulation products in MEMS capacitors, and their effects

GAAS 2005 Conference Proceedings - 13th European Gallium Arsenide and Other Compound Semiconductors Application Symposium

Volumn 2005, Issue , 2005, Pages 593-596

  Girbau, David ^a   Otegi, Nerea ^b   Pradell, Lluís ^a   Lázaro, Antonio ^c  

^a UNIVERSITAT POLITÈCNICA DE CATALUNYA   (Spain)

^b UNIVERSITY OF THE BASQUE COUNTRY UPV EHU   (Spain)

^c UNIVERSITAT ROVIRA I VIRGILI   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; COMPUTER SIMULATION; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; SIGNAL DISTORTION; SIGNAL THEORY;

COMMUNICATION SIGNALS; INTERMODULATION DISTORTION (IMD); MEMS MEMBRANES; NONLINEAR MODELS;

INTERMODULATION;

EID: 33847192128     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. L. Dussopt, G.M.Rebeiz, "Intermodulation Distortion and Power Handling in RF MEMS Switches, Varactors, and Tunable Filters", IEEE Trans. Microwave Theory and Tech., Vol.51, No4, Apr. 2003.
2. M. Innocent, P. Wambacq, S. Donnay, H. A. C. Tilmans, W. Sansen, H. De Man, "An analytic Volterra-Series-Based Model for a MEMS Variable Capacitor", IEEE Trans. Computer-Aided Design of Int. Circuits and Systems, Vol.22, No2, Feb. 2003.
3. D.Girbau, A.Lázaro, L.Pradell, "Characterization of dynamics and power handling of RF MEMS using vector measurement techniques", IEEE Trans. on Microwave Theory and Techniques, Vol. 52, No11, pp. 2627-2633, Nov. 2004.