Development of a KOH defect etching furnace with absolute in-situ temperature measurement capability

Materials Science Forum

Volumn 483-485, Issue , 2005, Pages 283-286

  Sakwe, S A ^a   Herro, Z G ^a,b   Wellmann, P J ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

^b UNIVERSITÉ MONTPELLIER 2   (France)

Author keywords

6H SiC single crystals; Dislocations; Etching; Etching furnace; Molten KOH; Temperature profile; Thermoelement

Indexed keywords

DISLOCATIONS (CRYSTALS); ETCHING; POTASSIUM HYDROXIDE; SINGLE CRYSTALS; TEMPERATURE MEASUREMENT;

DEFECT STATISTICS; ETCHING FURNACE; TEMPERATURE PROFILE; THERMOELEMENT;

SILICON CARBIDE;

EID: 33644909498     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/0-87849-963-6.283     Document Type: Conference Paper

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