SCOPUS 정보 검색 플랫폼

2003 Nanotechnology Conference and Trade Show - Nanotech 2003

Volumn 1, Issue , 2003, Pages 304-307

Symmetry and symmetry breaking in electrostatic MEMS

(3) Pelesko, J A a Bernstein, D H b McCuan, J c

a UNIVERSITY OF DELAWARE (United States)

b MEMS and Microlectron (United States)

c GEORGIA INSTITUTE OF TECHNOLOGY (United States)

Author keywords

Electrostatic actuation; Pull in, instability; Semi linear elliptic problem; Symmetry breaking

Indexed keywords

ELECTROSTATIC ACTUATION; PULL-IN; SEMI-LINEAR ELLIPTIC PROBLEM; SYMMETRY BREAKING;

ACTUATORS; APPROXIMATION THEORY; ASPECT RATIO; BOUNDARY CONDITIONS; CRYSTAL SYMMETRY; ELASTICITY; ELECTROSTATICS; MATHEMATICAL MODELS; NANOSTRUCTURED MATERIALS; PROBLEM SOLVING;

MICROELECTROMECHANICAL DEVICES;

EID: 6344282572 PISSN: None EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (12)

References (9)

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