Preparation of AZO/ZnO/AZO/SiO2/Si thin film for FBAR

Proceedings of the IEEE Ultrasonics Symposium

Volumn 2, Issue , 2003, Pages 2016-2019

  Kang, T Y ^a   Keum, M J ^a   Son, I H ^b   Kim, K S ^c   Lee, J B ^c   Kim, K H ^a  

^a Gachon University College of Medicine   (South Korea)

^b Shinsung University   (South Korea)

^c The University of Texas at Dallas   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC RESONATORS; CERAMIC MATERIALS; CRYSTALLINE MATERIALS; CRYSTALLOGRAPHY; SPUTTERING; SUBSTRATES; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

FACING TARGET SPUTTERING (FTS); FILM BULK ACOUSTIC RESONATORS (FBAR); PIEZOELECTRIC THIN FILMS;

PIEZOELECTRIC DEVICES;

EID: 4143150947     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

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2. Fran.C.M. Van De Pol/thin-film ZnO-Properties and Applications.", Csramic Bulletin, Vol. 69, No. 12, pp. 1959-1965(1990)
3. D.J. Mapps, G.Pan, M.A. Akhter, S.Onodera, A. Okabe, J.Magn. Magn. Mater. 120 (1993) 305, "In-contact magnetic recording performance of Pt/CoCrTa thin films on glass computer disks"
4. K.H. Kim, I.H. Son, M.J. Keum, H.Y. Seong, J.S. Yang, "Thin film properties by facing targets sputtering system", Surface 169-170 (2003) 575-578
5. K.H. Kim, S.H. Kong, M.J. Keum, I.H. Son, M.Nae, S. Nakagawa, "Preparation of transparent conductive thin films by facing targets sputtering system.", Appl. Surf. Sci. 169-170 (2001) 410.