Experimental and Theoretical Investigation on the Relationship between AlN Properties and AlN-based FBAR Characteristics

Proceedings of the Annual IEEE International Frequency Control Symposium

Volumn , Issue , 2003, Pages 779-784

  Jung, Jun Phil ^a   Lee, Jin Bock ^a   Lee, Myung Ho ^a   Park, Jin Seok ^a  

^a Hanyang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC RESONATORS; ACOUSTIC SURFACE WAVE DEVICES; ATOMIC FORCE MICROSCOPY; CRYSTAL ORIENTATION; ELECTRODES; EPITAXIAL GROWTH; MAGNETRON SPUTTERING; PIEZOELECTRIC MATERIALS; POLYCRYSTALLINE MATERIALS; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

FILM BULK ACOUSTIC RESONATORS (FBAR); FULL WIDTH AT HALF MAXIMUM (FWHM);

ALUMINUM NITRIDE;

EID: 1542275528     PISSN: 01616404     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

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