Measurement of ion temperature in ECR Ar/N2 plasma

Surface and Coatings Technology

Volumn 171, Issue 1-3, 2003, Pages 216-221

  Koga, Mayuko ^a   Yonesu, Akira ^b   Kawai, Yoshinobu ^a  

^a KYUSHU UNIVERSITY   (Japan)

^b UNIVERSITY OF THE RYUKYUS   (Japan)

Author keywords

ECR plasma; Ion temperature; Nitrogen plasma; Optical emission spectroscopy

Indexed keywords

ARGON; ELECTRON CYCLOTRON RESONANCE; EMISSION SPECTROSCOPY; IONS; NITROGEN; TEMPERATURE;

GAS CONCENTRATIONS;

PLASMAS;

ION; PLASMA; TEMPERATURE MEASUREMENT;

EID: 0038580358     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00274-3     Document Type: Article

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