Evolution of stresses in a simple class of oxidation problems

Acta Mechanica

Volumn 181, Issue 3-4, 2006, Pages 231-255

  Oh, E S ^a   Walton, J R ^b   Lagoudas, D C ^a   Slattery, J C ^b,c  

^a Department of Electrical and Computer Engineering   (United States)

^b TEXAS A AND M UNIVERSITY   (United States)

^c NONE

Author keywords

[No Author keywords available]

Indexed keywords

EIGENSTRAIN; MOLECULAR OXYGEN; SILICON OXIDATION;

EIGENVALUES AND EIGENFUNCTIONS; ELASTICITY; OXIDATION; PROBLEM SOLVING; SILICON; STRESS CONCENTRATION;

STRESSES;

EID: 33644622576     PISSN: 00015970     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00707-005-0281-8     Document Type: Article

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