A new theory for silicon oxidation

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 5, 1996, Pages 3316-3320

  Peng, Kuang Yao ^a   Wang, Long Ching ^b   Slattery, John C ^a  

^a Texas AandM University   (United States)

^b TEXAS A AND M UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0007854648     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588825     Document Type: Article

References (20)

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